Preparation and Wear Resistance of TiBC, TiBN, SiNX Single Layer Film and TiBC-SiNX and TiBN-SiNX Double Layer Film by Thermal Plasma CVD
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چکیده
منابع مشابه
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ژورنال
عنوان ژورنال: Journal of the Japan Society of Powder and Powder Metallurgy
سال: 2007
ISSN: 0532-8799,1880-9014
DOI: 10.2497/jjspm.54.287